AXCELIS TECHNOLOGIES INC
Cash Flow History
| Period | Operating Cash Flow | Free Cash Flow | CapEx | Share-Based Compensation |
|---|---|---|---|---|
| Mar 2022 | $25.8M | $24.3M | $1.5M | $2.7M |
| Jun 2022 | $3.5M | $1.6M | $1.9M | — |
| Sep 2022 | $64.0M | $60.5M | $3.5M | — |
| Mar 2023 | $34.6M | $32.3M | $2.2M | $3.2M |
| Jun 2023 | $32.7M | $29.8M | $3.0M | — |
| Sep 2023 | $24.0M | $18.7M | $5.3M | — |
| Mar 2024 | $42.2M | $40.6M | $1.6M | $4.7M |
| Jun 2024 | $40.1M | $38.1M | $2.0M | — |
| Sep 2024 | $45.7M | $41.8M | $3.9M | — |
| Mar 2025 | $39.8M | $34.8M | $5.0M | $4.9M |
| Jun 2025 | $39.7M | $37.7M | $2.0M | — |
| Sep 2025 | $45.4M | $43.3M | $2.0M | — |
| Mar 2026 | $18.1M | $16.3M | $1.8M | $4.9M |
| Jun 2026 | $18.4M | $14.8M | $3.6M | — |